ATTEMPT OF TARGET SLANTING ON FACING TARGETS SPUTTERING SYSTEM
نویسندگان
چکیده
منابع مشابه
Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...
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In bulk FeTi alloys prepared by facing target type sputtering, an amorphous phase was obtained between 25 and 75 at% Ti. These alloys are weak itinerant electron ferromagnets and the Curie temperature decreases with increasing Ti concentration and becomes zero at about 60 at% Ti.
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a cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. the substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. the al/ cu multilayer film was deposited on the glass substrate at the following conditions: working g...
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ژورنال
عنوان ژورنال: Journal of the Magnetics Society of Japan
سال: 1991
ISSN: 0285-0192,1880-4004
DOI: 10.3379/jmsjmag.15.s2_939